
The SciencesNovember 1, 1972
Microcircuits by Electron Beam
By using an electron beam to trace the patterns of electronic circuits it should soon be possible to put 100,000 transistors and similar devices on a silicon chip a few millimeters square

Microcircuits by Electron Beam
By using an electron beam to trace the patterns of electronic circuits it should soon be possible to put 100,000 transistors and similar devices on a silicon chip a few millimeters square