Skip to main content

Stories by Phillip W. Barth

Silicon Micromechanical Devices

Tiny valves, nozzles, pressure sensors and other mechanical systems can be chemically etched in a wafer of single-crystal silicon. Such devices can be mass-produced much as microelectronic circuits are...

April 1, 1983 — James B. Angell, Stephen C. Terry and Phillip W. Barth
Scroll To Top

Memorial Day Flash Sale

Memorial Day Flash Sale

How Smartphones Affect Mental Health